The working principle of vacuum evaporation coating machine system is introduced
From: VacuumFamily.COM News Centre Add Time: 2016-1-19 9:39:00
Vacuum evaporation coating machine system mainly refers to the film forming device, a lot of film forming device coating machine, resistance heating, electron gun evaporation, magnetron sputtering, rf sputtering, ion plating, such as a variety of ways, I resistance heating and gun evaporation introduce two kinds of way, because the two ways I used more.
Evaporation resistance according to its structure and working principle of the application is by far the most, the most extensive way of evaporation, evaporation is also used for the longest way. The way it works is that the tungsten as a ship, and then installed in the middle of the two electrodes, in the middle of the tungsten boat with herbs, again slowly to the electrode current, current through the tungsten, tungsten boat electric heating, the low voltage, high current make tungsten boat to generate heat, high melting point and heat transfer to the coating material, when the quantity of heat of tungsten boat is higher than the melting point of coating material, material sublimation or vaporization, this method because of easy operation, simple structure, low cost, so is a lot of equipment used, but the evaporation of thin film because of the low density, plus a lot of material can't use this way to evaporation, so it has certain limitations. Tungsten boat evaporation coating materials, the melting point of materials must be less than the melting point of tungsten boat, or there will be no way.
Gun evaporation is by far the most a evaporative way, it can evaporate any a kind of coating material, the way it works is that: the coating material in the crucible, the evaporation source into a filament shape, using a special control cabinet, the filament with a strong current, high voltage, due to the material is tungsten filament, so it will be hot, in the end will launch electronic, and adoption of a certain magnetic field will be gathered into a certain shape, and drawing on the crucible, thus formed a beam, due to the electron temperature is very high, can melt any coating materials, as the coating materials is after electron beam melting (some of the material is directly sublimate), medicinal herbs of molecules (atoms or ions) in a vacuum into linear motion, then meets the base board, and then condense, growth through this way, form a film! The most commonly used is now set to be 270 degrees, the deflection Angle of electron beam, or running track line for e e gun or electron beam deflection Angle of 180 degrees, orbit for c type gun two kinds.
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