From: VacuumFamily.COM News Centre Add Time: 2016-2-1 17:12:00
Multi arc ion coating machine is a kind of efficient and harmless, non-polluting ion coating equipment, has the deposition speed, high ionization rate, large ion energy, equipment, the advantages of simple operation, low cost, large quantity. Many arc ion coating machine mainly by multiple metal evaporation source as a cathode, and through between the anode and produce arc discharge, when the evaporation of target particles and into the studio after ionization gas reaction, so that the production of compound precipitated in the coating film is formed on the surface of the base material. In the process of coating, vacuum pressure, arc source bias voltage and current, flux of gas flow rate and temperature of vacuum require very accurate setting and control the whole process of the process is mainly composed of work in the vacuum, vacuum, bombarding and sputtering, coating and baked a few most, the concrete process as follows: Start - check instrument - diffusion pump preheating - parts, close the oven door - vacuum to the set pressure P1 - filling the gas to the set pressure P2 - work-piece, according to the way and the number of complete set bombardment bombardment - setting humidity, coating bias - deposition pressure to the set point P3 - set according to the flow in the gas B - bias deposition time - out step by step.
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