Since the lights coater principle divided into many types, simply because both require a high degree of vacuum and have a unified name. So for different principles of vacuum coating, uniformity of factors are not the same. And the uniformity of the concept itself will be with the scale and film coating composition and has a different meaning, the following were said about:
Uniformity is mainly reflected in three aspects:
1. The uniformity of thickness to be understood as roughness, in terms of scale optical film (that is 1/10 of the wavelength as a unit, about 100A), the uniformity of the vacuum coating is already quite good, can easily be rough the degree of control in the visible wavelength range of 1/10, that the optical properties of multi-arc ion coating machine, the vacuum coating without any obstacles. However, if the mean atomic layer uniformity on the scale, that is to achieve a smooth surface 10A or 1A, it is now the main vacuum coating technology content and technical bottlenecks.
2. The chemical composition uniformity on: that in the film, due to the atomic group of compounds scale branch is too small and it is easy to produce uneven characteristics, SiTiO3 film, if splashing sputter coater unscientific process, the actual the surface of the component is not SiTiO3, but may be of other proportions, plating film is not the desired chemical composition of the film, which is also where the vacuum coating technology content.
3. The degree of uniformity of the crystal lattice ordering: This determines the film is a monocrystalline, polycrystalline, amorphous, is the vacuum coating technology of hot issues.
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